ASML and TSMC want the glass plate that carries a chip's pattern, called a photomask, to be twice as wide. On 7 September 2026, ahead of the SPIE BACUS conference in Monterey, the two companies set up a joint industry initiative. It aims to move chipmakers from today's 6-inch photomasks to 12-inch photomasks for High NA extreme ultraviolet lithography, the newest kind of chip-printing machine.
Quin Halberg · Wednesday 9 September 2026
Sources
- ASML: TSMC and ASML announce industry transition to large-format photomasks for High NA EUV
- Intel Newsroom: Intel Foundry and ASML accelerate industry readiness for High NA EUV
- Intel Foundry and ASML Collaborate to Accelerate Industry Readiness for High NA EUV
- Samsung Newsroom: Samsung and ASML expand their chipmaking collaboration
This desk has not corrected this file. Corrections.






The paper
Comments
No notes on this story yet.
Sign in to comment